Scanning Electron Microscope SEM3200
Product Paramenters:
SEM3200 is a tungsten filament scanning electron microscope
with high performance and wide application.
It has excellent imaging quality capabilities in both high and
low vacuum modes. It also has a large depth of field with a
user friendly environment to characterize samples.What's
more, rich scalability helps the users to explore the world of
microscopic imaging.
| Model |
SEM3200A |
SEM3200 |
| Electronoptical |
Electrongun |
Pre-alignedmedium-sizedfork-typetungstenfilament |
| system |
Resolution |
Highvacuum |
3nm@30kV(SE) |
| |
4nm@30kV(BSE) |
| |
8nm@3kV(SE) |
| |
*Lowvacuum |
3nm@30kV(SE) |
| |
Magnification |
1~300,000x(film) |
| |
1~1000,000x(screen) |
| |
Acceleratingvoltage |
0.2kV~30kV |
| Imagingsystem |
Detector |
Secondaryelectrondetector(ETD) |
| *EBSD,*LowvacuumSED,*EDS |
| Imageformat |
TIFF,JPG,BMP,PNG |
| Vacuumsystem |
Vacuummode |
Highvacuum |
Betterthan5×10-4Pa |
| *Lowvacuum |
5~1000Pa |
| Controlmode |
Fullautomatic |
| Turbomolecularpump |
≥240L/S |
| Mechanicalpump |
200L/min(50Hz) |
| Sampleroom |
Camera |
Opticalnavigation |
| Monitoring |
| Samplestage |
Threeaxisautomatic |
Fiveaxisautomatic |
| Distance |
X:120mm |
X:120mm |
| Y:115mm |
Y:115mm |
| Z:50mm |
Z:50mm |
| / |
R:360° |
| / |
T:-10°~+90° |
| Software |
Language |
Chinese/English |
| OS |
Windows |
| Navigation |
Opticalnavigation,gesturequicknavigation |
| Automaticfunction |
Autobrightnesscontrast,autofocus,autoastigmatism |
| Featuredfunction |
Intelligentassistedastigmatism,maximumimageMosaic(optionalsoftware) |
| Installation |
Size |
L≥3000mm,W≥4000mm,H≥2300mm |
| Requirements |
Temperature |
20ºC~25ºC |
| |
Humidity |
≤50% |
| |
Electricalpower |
AC220V(±10%),50Hz,2kVA |
Product Features
Low voltage
For carbon material samples, at low voltage, the penetration depth is small, and the true morphology of the sample surface can be
obtained with richer details.
For hair samples, at low voltage, the damage of electron beam irradiation is reduced and the charge effect is eliminated.
Low vacuum
The filter fiber tube material has poor electrical conductivity and obvious charge under high vacuum. Under low vacuum,
the non-conductive sample can be directly observed without coating.
Rich scalability
Scanning electron microscope is not only limited to the observation of surface morphology, but also can be used to analyze
the micro-components of the sample surface.
In addition to conventional secondary electron detector (ETD), backscattered electron detector (BSED), and X-ray energy
dispersive spectrometer (EDS), many interfaces are reserved, such as electron backscattered diffraction (EBSD), cathode ray (CL)
detectors can be integrated on SEM3200.
Backscattered electron detector
In the backscattered electron imaging mode, the charge effect is weakened obviously, and more composition information
can be obtained on the sample surface.
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