Customization: | Available |
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Warranty: | 1 Year |
Magnification: | >1000X |
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Ultra-high resolution Field Emission Scanning Electron Microscopy (FESEM): 0.6 nm@15 kV and 1.0 nm@1 kV
The CIQTEK SEM5000X ultra-high resolution FESEM utilizes the upgraded column engineering process, "SuperTunnel" technology, and high-resolution objective lens design to improve low-voltage imaging resolution.
The FESEM SEM5000X specimen chamber ports extend to 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), significantly expanding the applications. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.
Key Parameters |
Resolution | 0.6nm@15 kV SE |
1.0nm @1kV,SE | ||
Acceleration Voltage | 20V~30 kV | |
Magnification | 1~2,500,000x | |
Electron Gun Type | Schottky Field Emisslon Electron Gun | |
Specimen Chamber |
VacuumSystem | Fully automated control |
Cameras | Dual cameras (optical navigation+chamber monltor) | |
StageType | 5-Axis Mechanical EucentricSpecimen Stage | |
Stage range | X=110mm,Y=110 mm,Z=65 mm T:-10*~+70°,R.360° |
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Detectors and Extensions |
Standard | In-lens detector |
Everhart-Thornley Detector(ETD) | ||
Optional | Retractable Back-Scattered Electron Detector (BSED) | |
RetractableScanning Transmlssion Electron MicrosCOpy detector (STEM) |
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Energy Dispersive Spectrometer(EDS) | ||
Electron BackscatteredDiffraction Pattern(EBSD) | ||
Specimen exchange loadlock (4°&8"optional) | ||
Trackball &Knob ControlPane | ||
Specimen stage tandem deceleration | ||
Magneticfield &acoustic noiseenclosure system (SEM certified) |
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Software | Languages | Chinese/English |
Operating System | Windows | |
Navigation | Nav-Cam,Gesture Quick Navigation | |
Automatic Functions | Auto Brightness &Contrast,Auto Focus,Auto Stigmator |